Orthogonal beam delivery system for wafer edge processing

ABSTRACT

A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and optical system to direct a beam of radiation onto a rotating substrate supported by a chuck, in atmosphere. The optical system accurately and precisely directs the beam to remove or transform organic or inorganic films, film stacks, residues, or particles from the top edge, top bevel, apex, bottom bevel, and bottom edge of the substrate in a single process step. Reaction by-products are removed by means of an exhaust tube enveloping the reaction site. This invention permits precise control of an edge exclusion width, resulting in an increase in the number of usable die on a wafer. Wafer edge processing with this invention replaces existing methods that use large volumes of purified water and hazardous chemicals including solvents, acids, alkalis, and proprietary strippers.

RELATED APPLICATION(S)

This application claims the benefit of U.S. Provisional Application No. 61/419,602, filed on Dec. 3, 2010. The entire teachings of the above application are incorporated herein by reference.

TECHNICAL FIELD

This patent application generally relates to wafer processing in the manufacture of integrated circuits, and to a method and apparatus for removal of films from semiconductor substrates at various stages of processing. It specifically relates to a method and apparatus for laser beam delivery in an edge processing system to remove organic, inorganic, and other semiconductor films or other materials from the edges of silicon wafers or other substrates. These films are removed in order to reduce the number of defects generated around the periphery of the wafers that cause loss of good die in integrated circuit manufacturing.

BACKGROUND OF THE INVENTION

In the fabrication of semiconductors, a number of different types of unwanted films, particles, and residues are formed or are left on the edges of silicon wafers. The relevant edges include the top (or front), top bevel, apex (or sidewall), bottom bevel, and bottom (or back) edges of wafers (hereinafter “wafer edges”). These edges are further specified in the International Standards published by Semiconductor Equipment and Materials International (SEMI) of San Jose, Calif. and referred to as the SEMI M1-1109 and SEMI M73-0309 specification documents.

Many types of processes are used that result in such unwanted materials, including photoresist coating, plasma etching, dielectric and metal deposition, wet etching, grinding, and chemical mechanical polishing (CMP). These processes all result in various films, residues, and particles being deposited or left on the wafer edges.

The unwanted materials on wafer edges may be organic polymer films, such as photoresist edge beads, or residues, such as post-etch polymer films that remain on the edge of a wafer after a plasma etching operation. Other types of unwanted materials on wafer edges include metals, ‘black silicon’, silicon particles, and polishing residues.

During semiconductor manufacturing, wafers are transported from one tool to another in cassettes, and once loaded into a tool, are moved between process stations with robots handlers. As a consequence, films at the very edges of wafers become abraded, cracked, and broken. Cracked film fragments and particles contaminate vacuum chucks, robotic handlers, and cassettes, causing tool down time and die yield loss. Backside wafer contamination may distort or tilt the wafer during subsequent imaging, also causing yield loss.

Another source of wafer edge defects is the formation of a photoresist edge bead, caused when the wafers are spin coated prior to lithographic imaging. Photoresist spin coating is repeated many times in the fabrication of an integrated circuit chip, depending on the number of lithographic levels used to make the device. A thickened bead of photoresist is formed at the outermost top edge. Excess photoresist also migrates to the apex, beveled edges, and bottom edge of the wafer. The photoresist bead on the edge is easily cracked by robots handling the wafers, resulting in flakes of photoresist re-depositing on good die, causing yield loss. Any photoresist remaining on the wafer's bottom edge also sticks to vacuum chucks, causing leveling and distortion problems in lithography, and creating more cracked flakes of photoresist. Two methods are currently used for the removal of photoresist edge bead films. The first method is called wafer edge exposure and development (WEE), a two-step process described below in a prior art patent. The second conventional method for photoresist removal from wafer edges is solvent spraying or solvent cleaning.

Another example is residue left behind from plasma etching. These etch residues are thin, tough films such as halogenated polymers. They are deposited mainly on the wafer's bevel, apex, and bottom edges. They cannot be removed by conventional wet chemical means, and are currently removed with a grinder, in combination with a fluid to make a slurry. This is a messy and particle-generating process that leaves many defects behind. If these etch residues are not removed, they will crack, break up and leave particles on otherwise usable portions of the wafer, causing die loss.

Another example of an edge-cleaning problem is the removal of copper films from wafer edges, left over from copper metallization and etching steps. Remaining copper films on the wafer edges will cause electrical shorting and arcing during subsequent wafer processing steps. Copper films left on wafer edges must removed by a complex etching operation, for example wet etching followed by high purity water rinsing and drying steps.

Another edge cleaning problem is the treatment of ‘black silicon’ needle-like structures that are the result of a reactive ion etch (RIE) process. These structures are currently removed by a wet-etch process using hydrofluoric acid, followed by high purity water rinsing and drying steps.

Another example of an edge cleaning problem is the generation of silicon particles from edge thinning operations, commonly used in 3D interconnect devices. Grinding with abrasive wheels leaves large ridges of silicon that interfere with wafer-to-wafer bonding operations. Currently, the only method of removing these ridges is by chemical etching with hydrofluoric acid and water rinsing.

Another example of an edge-cleaning problem is defects resulting from chemical-mechanical polishing (CMP) residue. CMP slurries flow around the apex of wafers and onto the bottom edges. These residues and particles migrate onto vacuum chucks, robotic handlers, and other wafer processing equipment, again leading to die loss.

Yet another example of an edge-cleaning problem arises from the use of silicon-containing photoresist such as in tri-layer film stacks, consisting of an organic polymer layer, a carbon-based layer, and a silicon-containing layer. The silicon content can typically be up to 50% of the polymer content, and conventional removal methods, such as wafer edge exposure and development (WEE) or solvent cleaning, will not completely remove these silicon based films. Removal of silicon layers is currently performed in an etching operation with a reactive ion etcher system using fluorinated gas mixtures, followed by considerable water rinsing and drying steps.

PROBLEMS WITH THE PRIOR ART

There are many film types to be removed from wafer edges, each requiring specific cleaning methods. Wafer edge processing in semiconductor manufacturing requires many different types of chemicals and tools, and is therefore complex and costly. Each of these conventional methods is described in more detail below with reference to specific prior art.

One example of a problem with the prior art relates to a method for dispensing liquid in a solvent-based edge cleaning process, as described in U.S. Pat. No. 5,392,989 and U.S. Patent Publication No. 2010/0051073 A1. This problem relates to the inability of the liquid solvent to control the geometry of the cleaned edge. The cleaning fluid is dispensed and spreads on the wafer surface, leaving a tapered edge of photoresist that may be several millimeters wide. The width of the area on the periphery of the wafer lost due to edge cleaning is called the ‘edge exclusion’. The International Technology Roadmap for Semiconductors (ITRS) specifies the parameters for integrated circuit production into the future, and the semiconductor industry companies follow this path. The ITRS specifies a reduction of the edge exclusion from the current 3-5 mm to below 1 mm in the future. Solvent-based edge cleaning cannot currently meet this specification due to the inability to effectively control the solvents. This inability includes solvent splashing onto good die causing yield loss. Organic solvents, such as ethyl lactate or cellosolve acetate, cause environmental problems, raise safety concerns, and are costly to use. Finally, after solvent edge cleaning, a thin residue of photoresist is typically left behind, requiring further chemical processing and rinsing to remove.

Another example of a problem with the prior art relates to etching the edge of a wafer in a chamber with acids, as described in U.S. Pat. No. 7,267,726 B2 and U.S. Pat. No. 7,182,821 B2. Some of the acids used are hydrofluoric (HF), sulfuric (H₂SO₄), and nitric (HNO₃). These chemicals are hazardous to use and require the use of complex and costly equipment, raising environmental problems and safety concerns. As with the solvent method listed above, it is difficult to effectively control the width of the edge exclusion zone. This method is specifically used to remove metal films, but due to the non-uniformity of these films at the edge of the wafer, it is difficult to control the etch depth. This method is also used for removing Teflon-like particles, but is not effective for removing photoresists.

Another example of a problem with the prior art relates to photoresist edge bead exposure and development (WEE), as described in U.S. Pat. No. 6,495,312 B1, U.S. Pat. No. 7,460,211 B2, and U.S. Patent Publication No. 2010/0285399 A1. This method requires two pieces of equipment to remove the photoresist edge bead: an exposure source, which is a high intensity lamp, and a separate wet developing system that uses an alkaline developer followed by a single or double rinse with high purity water. Since multiple pieces of equipment are used, this increases the time to complete the process, reducing throughput. The exposure step is often not adequate in removal of very thick edge beads; therefore a solvent cleaning process step is required. This method addresses photoresist edge beads, but there are many other types of more difficult films, such as post-etch polymers, that need to be removed, but cannot be addressed with WEE. Finally, since WEE only removes films from the top edge of the wafer, the apex and bottom edge must be cleaned by another method.

Another example of a problem with the prior art relates to a lithographic masking method, as described in U.S. Patent Publication No. 2007/0093067 A1 and U.S. Pat. No. 7,745,095 B2. This method is complex in that at least four individual steps are required to clean the wafer edge. Steps may include pre-cleaning, depositing and removing of organic coatings, lithographic exposure, developing, rinsing, and drying. This method requires multiple pieces of expensive equipment, consumes considerable volumes of solvent and water, and reduces throughput.

Another example of a problem with the prior art relates to a method using reactive plasma, as described in U.S. Pat. No. 7,651,585 B2 and U.S. Patent Publication No. 2010/0099265 A1. This method requires a complex plasma-etching tool using a vacuum chamber and reactive gases. The plasma is a non-uniform field of energetic ions surrounding the edge of the wafer; thus there is a gradient in the film being removed instead of a sharply defined edge. The width of the gradient adds to the edge exclusion zone, thereby reducing the usable die area. The complexity of the tool, as well as the vacuum chamber pump time, adds considerable cost and limits throughput.

Another example of a problem with the prior art relates to mechanical methods for cleaning wafer edges as described in U.S. Patent Publication No. 2010/0190416 A1 and U.S. Patent Publication No. 2009/0029629 A1. Chemical mechanical polishing (CMP) uses an abrasive polishing pad and wet chemicals to polish the wafer. The by-product of this process is a polishing slurry residue left on the bottom and edges of the wafer. The current method for removing this slurry residue is frictional surface cleaning, as described in U.S. Patent Publication No. 2009/0044831 A1. This method leads to loss of usable die due to particle generation.

Another example of a problem with the prior art relates to the use of frozen carbon dioxide particles to clean wafer edges, as described in U.S. Pat. No. 7,270,136 B2. The problems with this method are that the equipment used to perform this process is highly complex and expensive, and the impact of the frozen particles can cause damage to the substrate and to otherwise usable die.

Another example of a problem with the prior art relates to applying a flame to the edge of a wafer in the presence of reactive gasses including halogens and ozone, as described in U.S. Patent Publication No. 2008/0010845 A1. For example, a hydrogen-rich flame with oxygen and nitrogen trifluoride (NF₃) produces hydrogen fluoride (HF) that etches the edge of the wafer. Nitrogen trifluoride is a highly toxic and expensive gas that is typically used to clean deposition chambers in semiconductor manufacturing. Further, this method may require pre-heating the wafer to prevent condensation of the by-products onto the wafer, causing die loss. The apparatus described is very complex since the gas plumbing and safety requirements are extreme for the types of gases proposed for this edge cleaning method. Lastly, the method cannot remove films from all wafer edges in a single step and is not effective for photoresist removal.

Another example of a problem with the prior art relates to the use of a pressurized stream of a non-solvent medium, which may be a gas, to clean wafer edges, as described in U.S. Patent Publication No. 2004/0126923 A1. An expected problem with this method would be the scattering of particles onto the usable areas of the wafer, as well as the surrounding equipment. Additionally, this patent application claims that the medium must not be a solvent for the material being removed, which severely limits use on a variety of films due to its non-reactive nature.

Finally, another example of a problem with the prior art relates to the method of using an oblique-angled nozzle containing a laser beam combined with inert gas, as described in U.S. Pat. No. 6,874,510 B2. One problem with this method is that the beam used to clean the wafer edge is inside the gas delivery nozzle, such that the gas cannot be independently directed to prevent material from falling onto the good die toward the center of the wafer. Such laser reactions create a cloud of debris. If the gas nozzle is not positioned to remove this cloud away from the center of the wafer, debris will re-deposit onto good die causing yield loss. This prior art uses a chamber, which further complicates the process of removing the debris, as it becomes confined in the chamber, and can re-deposit onto the wafer as well as build-up on the chamber walls. Another problem with this prior art method is that the gas used is inert, and therefore does not permit reaction with films on the wafer edges. Yet another problem with this prior art is that this method shows cleaning only on the top surface. However, if a source of this type were redirected to the apex, the reaction by-products would be blown onto the good die at the center of the wafer, causing significant die loss. Still another problem with this prior art is that it requires the laser beam to impinge on the wafer edge at an oblique angle, introducing several problems including beam distortion and focusing issues at the wafer plane.

Due to the limitations of current edge cleaning methods, otherwise usable space on the periphery of a wafer is consumed. As an example, with a die size of 7.5 mm×7.5 mm, increasing the usable space on a 300 mm wafer by decreasing the edge exclusion width from 5.0 mm to 0.6 mm results in a potential gain of 64 die per wafer. Therefore, considerable effort is given to keep the edge cleaning area, called the edge exclusion, to a minimum. The ITRS, specifically in the area of edge exclusion, indicates the need to move from current 3-5 mm edge exclusion down to 1 mm or less in the next two years. Conventional wet edge bead cleaning methods are unable to control edge exclusion to this level due to the natural movement of liquids on smooth surfaces, such as a highly polished silicon wafer. It is recognized by those practiced in the art that a non-liquid means of edge cleaning is needed to meet the ITRS guidelines.

Thus there is a need for an improved method and apparatus for cleaning the edges of substrates, such as silicon wafers, which overcomes the aforesaid limitations of the cited prior art. There is also a need for a method and apparatus that does not require the use of solvents, corrosive chemicals, or large volumes of highly purified water. There is also a need for a method and apparatus that prevents process by-products from re-depositing onto usable die. There is a further need for an improved method and apparatus for edge cleaning that can address a wide variety of films, eliminating the need for different systems for each film type. There is also a need for an edge cleaning method and apparatus that can accurately clean all wafer edges (top, top bevel, apex, bottom bevel, and bottom) in a single tool, thereby reducing the cost and complexity of the cleaning process. Finally, there is a further need for an edge cleaning method and apparatus that can precisely control the width of the area being cleaned on the edge of a substrate to 1 mm or less, in order to increase the die yield and meet future semiconductor manufacturing requirements.

SUMMARY

The present disclosure is directed to removal or transformation of unwanted films, particles, and residues on the edges of substrates, such as silicon wafers, by directing laser radiation, in the presence of air or other fluids, to the top edge, top bevel, apex, bottom bevel, and bottom edge (hereinafter ‘wafer edges’) portions of the substrate. By-products are removed by means of a vacuum exhaust.

More specifically, the present disclosure describes an optical beam delivery assembly that can be integrated into a larger system for semiconductor processing. This beam delivery assembly, when integrated into a system, uses a small solid state laser and gas to remove films that are presently removed with large volumes of highly purified water and expensive, environmentally unfriendly solvents.

One object herein is to sequentially direct a laser beam onto the top, apex, and bottom of a rotating substrate in order to address a wide variety of materials on all of the wafer edges in a single tool with a single dry process. A preferred embodiment processes materials on all wafer edges, in a single tool, by the use of an optical beam delivery assembly to sequentially direct the laser beam to each edge.

Another object is to process circumferential bands on the edges of a wafer that are wider than the laser beam. In a preferred embodiment, a galvanometric scanning mirror is used for this purpose.

Another object is to focus said laser beam onto each surface scanned, such that the optical path length is equal for top, apex, and bottom surfaces and the beam always remains in focus. The preferred embodiment uses a telecentric f-theta lens followed by an assembly of mirrors with adjustments to insure equal path lengths.

Another object is to rapidly switch between top, apex, and bottom beams, in order to maintain high throughput. In the preferred embodiment, the beam is initially directed onto the substrate top. A mirror, which moves parallel to its reflecting surface, is used to re-direct the beam onto the substrate apex. Finally, another mirror, which also moves parallel to its reflecting surface, is used to re-direct the beam onto the substrate bottom.

Another object is to provide laser beam metrology in order to ensure accurate and consistent material removal or transformation. The preferred embodiment includes a provision to record profiles of the top, apex, and bottom beams during system setup and alignment, for example with a CCD camera. For periodic maintenance, the beam can be directed by means of a mirror, which moves parallel to its reflecting surface, onto a camera that can be permanently mounted in the tool in a position such that the path length is equal to the top, apex, and bottom beam paths.

Another object herein is to provide an apparatus that can be integrated into an edge processing system that does not require the use of solvents, corrosive chemicals, or large volumes of highly purified water, and does not harm the environment. In accordance with a preferred embodiment, the system operates at atmospheric pressure and uses laser radiation in the presence of gases, such as air or benign gas mixtures, to remove materials from wafer edges. This system permits the use of a dry process, eliminating the need for significant volumes of high-purity water, concentrated acids, highly alkaline solutions, proprietary strippers, or solvents.

Another object herein is to prevent process by-products from re-depositing onto usable die. In accordance with a preferred embodiment a laser and optical beam delivery assembly in conjunction with a vacuum exhaust system removes unwanted films, particles, and residues from wafer edges without re-depositing by-products onto otherwise usable die. A preferred embodiment uses a cylindrical exhaust tube, which envelops the substrate edge, with a longitudinal slot for the substrate and circumferential slots for the laser beam, and a vacuum exhaust source to create airflow to carry by-products and film residues away from the reaction zone, preventing any debris from landing elsewhere on the substrate.

Another object herein is to remove or transform a wide variety of materials on all of the wafer edges in a single tool with a single dry process, eliminating the need for different systems for each material type and thereby reducing the cost and complexity of current processing methods. In accordance with a preferred embodiment, a beam delivery assembly is provided that can be integrated into an edge processing apparatus to effectively remove or transform multiple film types, residues, and particles including, but not limited to, photoresist edge beads, photoresist residues, silicon-based polymer films, post-etch polymer residues, multi-layer film stacks, polishing residues, particles, metal films, and dielectric films. This is achieved by the interaction of the laser radiation with the unwanted films, residues, or particles and surrounding gas on all wafer edges.

Another object is to precisely control the width of the area being processed on the edge of a substrate, in order to increase the number of usable die and meet future semiconductor manufacturing requirements. This is accomplished by the use of a high-accuracy beam delivery assembly directing a precisely defined laser beam to all of the wafer edges.

Further objects, technologies, and areas of applicability of the method and apparatus will become apparent from the detailed description provided hereinafter. It should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for the purposes of illustration only and are not intended to limit the scope of the invention, the scope of which is only being defined by the various claims herein.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing will be apparent from the following more particular description of example embodiments of the invention, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating embodiments of the present invention. The organization and manner of the structure and operation of preferred embodiments, together with the above and further objects and advantages thereof, may best be understood by reference to the following description taken in conjunction with the accompanying drawings wherein like reference numerals identify the elements in which:

FIG. 1 a is a cross-sectional diagram showing a wafer and identifying various surfaces thereof.

FIG. 1 b is a cross-sectional diagram showing a top beam as it scans the top bevel and top of the wafer.

FIG. 1 c is a cross-sectional diagram showing an apex beam as it scans the top bevel, apex, and bottom bevel of the wafer.

FIG. 1 d is a cross-sectional diagram showing a bottom beam as it scans the bottom bevel and bottom of the wafer.

FIG. 2 a is a side-elevational view of a semiconductor wafer mounted on a vacuum chuck, prior to being coated with photoresist.

FIG. 2 b shows the same wafer as in FIG. 2 a, after being coated with photoresist.

FIG. 2 c shows the same wafer as in FIG. 2 b after the photoresist edge bead has been removed.

FIG. 3 a is an isometric drawing showing the mirror configuration that directs the laser beam to the top surface of the rotating wafer.

FIG. 3 b is an isometric drawing showing the mirror configuration that directs the laser beam to the apex of the rotating wafer.

FIG. 3 c is an isometric drawing showing the mirror configuration that directs the laser beam to the bottom surface of the rotating wafer.

FIG. 3 d is an isometric drawing showing the mirror configuration that directs the laser beam to a camera.

FIG. 4 a defines the top, apex, bottom, and camera beam path length segments.

FIG. 4 b defines the thickness of the wafer and the offset from the wafer edge of the top and bottom beams.

FIG. 5 is a top, front, and side view of the OTB (Orthogonal Tri Beam) assembly with the addition of supporting subsystems. This figure is shown with all movable mirrors in place and the laser beam taking all possible paths. This figure also shows which sets of mirrors move together on stages to fine-tune the length of each beam path.

FIG. 6 a is an isometric view of the wafer and exhaust system showing the beam directed to the top of the rotating wafer.

FIG. 6 b is an isometric view of the wafer and exhaust system showing the beam directed to the apex of the rotating wafer.

FIG. 6 c is an isometric view of the wafer and exhaust system showing the beam directed to the bottom of the rotating wafer.

FIG. 6 d is an isometric view of the wafer and exhaust system showing the exhaust tube retracted for wafer loading or unloading.

FIG. 7 a is a side view of an optional gas injection system of the edge processing system.

FIG. 7 b is an isometric view of a second configuration of an optional gas injection system of the edge processing system.

FIG. 7 c is an isometric view of a third configuration of an optional gas injection system of the edge processing system.

FIG. 8 is a side view of the OTB assembly integrated into a wafer processing system.

FIG. 9 a shows an example of the usable die lost with prior art edge exclusion.

FIG. 9 b shows an example of the usable die lost with the edge processing method and apparatus disclosed herein.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

A description of example embodiments of the invention follows.

While the invention as recited in the claims presented elsewhere in this document may be susceptible to embodiment in different forms, there is shown in the drawings, and will be described herein in detail, one or more specific embodiments with the understanding that the present disclosure is to be considered but one exemplification of the principles of the invention, and there is no intent to limit the invention to that as illustrated and described herein. Therefore, any references to “the present invention” and “the disclosure” throughout this document are to be interpreted only as a reference to one particular, non-limiting example embodiment of but one aspect of the many inventions described and disclosed in this document.

The disclosure describes an apparatus and methods(s) for removing or transforming unwanted films, residues, and particles from the top, top bevel, apex, bottom bevel, and bottom (hereinafter ‘wafer edges’) of semiconductor substrates.

The present invention provides a beam delivery assembly used for removing or transforming unwanted organic or inorganic films, particles, or residues from all of the wafer edges. The wafer is mounted on a rotary chuck, allowing the entire circumference of the wafer to be cleaned.

FIG. 1 a identifies the edges of the wafer 190 which are referred to in the description that follows. The surfaces that are scanned are the top 191, top bevel 192, apex 193, bottom bevel 194, and bottom 195. FIG. 1 b is an example showing the top beam 114 scanning the top 191 and top bevel 192 of the wafer 190, removing the photoresist 196 from the surfaces that are scanned. FIG. 1 c is an example showing the apex beam 115 scanning the top bevel 192, apex 193, and bottom bevel 194 of the wafer 190, removing the photoresist 196 from the surfaces that are scanned. FIG. 1 d is an example showing the bottom beam 116 scanning the bottom 195 and bottom bevel 194 of the wafer 190, removing the photoresist 196 from the surfaces that are scanned. The area where the laser beam is processing the wafer is hereinafter referred to as the ‘reaction site’.

FIGS. 2 a, 2 b and 2 c show how edge bead photoresist problems are created, and solved. FIG. 2 a shows an uncoated semiconductor wafer 190 placed on vacuum chuck 210. FIG. 2 b shows the same wafer coated with photoresist 196 where the excess photoresist 197 builds up on the edges of wafer 190, illustrating one edge bead problem. If this excess photoresist 197 on the edges of the wafer 190 is not removed, it may crack, shatter and leave particles on other parts of the wafer 190 and on process equipment, causing defects and die loss. FIG. 2 c shows wafer 190 after the excess photoresist 197 is removed using the method and apparatus described herein. Other materials, such as photoresist residues, silicon-based polymer films, post-etch polymer residues, multi-layer film stacks, polishing residues, particles, metal films, and dielectric films, if not removed, may also cause defects and die loss. These materials may also be processed using this method.

In the preferred embodiment, FIGS. 3 a, 3 b, 3 c, and 3 d show the same system, each with a different beam path configuration. In all of these figures a laser beam 111 exits the laser 110, is shaped by beam shaping optics 112, and directed by steering mirrors such as 113 into the Orthogonal Tri Beam (OTB) assembly 100. When the laser beam 111 enters the OTB assembly 100 through orifice 101 it reflects off a galvanometric scan mirror 120, which is used to steer the beam into a scan lens 130. In a preferred embodiment, the scan lens 130 is a telecentric f-theta lens with the properties wherein the angle of the scan mirror is proportional to the distance moved on the wafer 190, the beam exit angle is normal to the wafer 190, and the beam is focused on the plane of the wafer 190.

In FIG. 3 a the mirrors are shown in a configuration that directs the scanning laser beam 114 (represented by a thick center line and two thin lines on either side indicating the scan range) to the top surface of the wafer 190, which is scanned in a radial direction as shown in FIG. 1 b. In this configuration, the beam 114 exits the scan lens 130 and is directed to mirror 140, then directed to mirror 141 that directs the beam 114 onto the wafer 190. In the preferred embodiment, mirrors 140 and 141 are configured such that the scan direction is perpendicular to the plane of incidence of said mirrors in order to allow maximum scan range.

In FIG. 3 b the mirrors are shown in a configuration that directs the scanning laser beam 115 (represented by a thick center line and two thin lines on either side indicating the scan range) to the apex surface of the wafer 190, which is scanned in a axial direction as shown in FIG. 1 c. In this configuration, the beam 115 exits the scan lens 130 and is directed to moving mirror 150 that has been moved into the path of beam 115. Beam 115 is deflected to mirror 151, then to mirror 152, and then to the apex of the wafer 190. Mirrors 151 and 152 are positioned such that the beam path length is identical to the path length shown in FIG. 3 a, ensuring that beams with identical properties are delivered to the top and apex edges of the wafer 190.

In FIG. 3 c the mirrors are shown in a configuration that directs the scanning laser beam 116 (represented by a thick center line and two thin lines on either side indicating the scan range) to the bottom surface of the wafer 190, which is scanned in a radial direction as shown in FIG. 1 d. In this configuration, the beam 116 exits the scan lens 130 and is directed to moving mirror 160 that has been moved into the path of beam 116. Beam 116 is deflected to mirror 161, then to mirror 162, then to mirror 163, and then to the bottom of the wafer 190. Mirrors 161 and 162 are positioned such that the beam path length is identical to the path length shown in FIGS. 3 a and 3 b, ensuring that beams with identical properties are delivered to the top, apex, and bottom edges of the wafer 190. In the preferred embodiment, mirrors 160, 161, 162, and 163 are configured such that the scan direction is perpendicular to the plane of incidence of said mirrors in order to allow maximum scan range.

In FIG. 3 d the mirrors are shown in a configuration that directs the laser beam 117 to the camera 180. In this configuration, the beam 117 exits the scan lens 130 and is directed to moving mirror 170 that has been moved into the path of beam 117. Beam 117 is deflected to mirror 171, then to mirror 172, and then to the camera 180. The camera 180 is positioned such that the beam path length is identical to the path length shown in FIGS. 3 a, 3 b and 3 c, ensuring that the beam delivered to camera 180 has properties identical to the beams delivered to the top, apex, and bottom edges of the wafer 190.

In a preferred embodiment, all moving mirrors 150, 160, and 170 move in a direction parallel to the plane of each mirror. This ensures that a small error in the placement of each moving mirror will not result in a beam placement error on the wafer 190.

FIG. 4 a shows the relationships among the path lengths for a preferred embodiment, which are calculated as follows:

The total path length of the optical system from the exit (top) of the scan lens 130 to the wafer 190 is defined as P. This path length must be equal to the working distance of the scan lens 130. Referring to FIG. 4 a:

The distance from the exit of scan lens 130 to mirror 140 is defined as T₁.

The distance from mirror 140 to mirror 141 is defined as T₂.

The distance from mirror 141 to the top of wafer 190 is defined as T₃.

The distance from the exit of scan lens 130 to mirror 150 is defined as A₁.

The distance from mirror 150 to mirror 151 is defined as A₂.

The distance from mirror 151 to mirror 152 is defined as A₃.

The distance from mirror 152 to the apex of wafer 190 is defined as A₄.

The distance from the exit of scan lens 130 to mirror 160 is defined as B₁.

The distance from mirror 160 to mirror 161 is defined as B₂.

The distance from mirror 161 to mirror 162 is defined as B₃.

The distance from mirror 162 to mirror 163 is defined as B₄.

The distance from mirror 163 to the bottom of wafer 190 is defined as B₅.

The distance from the exit of scan lens 130 to mirror 170 is defined as C₁.

The distance from mirror 170 to mirror 171 is defined as C₂.

The distance from mirror 171 to camera 180 is defined as C₃.

FIG. 4 b shows a cross-section of the wafer 190 and the top laser beam 114, apex laser beam 115, and bottom laser beam 116 as they impinge upon the wafer 190. The thickness of the wafer 190 is defined as W.

In order to process the widest possible annulus on the wafer 190, when the laser beam exits the scan lens 130 on its optical axis, the position of the top laser beam 114 and the bottom laser beam 116 on the wafer 190 should be located slightly less than half of the total possible scan length, which is limited by the diameter of all system mirrors, from the edge of the wafer. Referring to FIG. 4 b, this distance is defined as D. In a preferred embodiment, the distance defined as D is identical for the top beam 114 and the bottom beam 116.

With independent variables D, W, P, T₁, T₂, B₁, B₃, C₁, and C₂, the following relationships ensure that the top, apex, bottom, and camera optical paths are all equal to the total optical path length P and that all mirror angles of incidence are 45° when the laser beam exits the scan lens 130 on its optical axis:

T ₃ =P−T ₁ −T ₂

A ₁ =−P+2T ₁ +T ₂ −W/2

A ₂ =P−T ₁ −T ₂ +W/4+D/2

A₃=T₂

A ₄ =P−T ₁ −T ₂ +W/4−D/2

B ₂ =P−T ₁ −T ₂ +W/2

B ₄ =P−T ₁ +W/2

B ₅ =−P+2T ₁ +T ₂ −W−B ₁

C ₃ =P−C ₁ −C ₂

Due to machine tolerances and other possible slight errors in the positions of the system mirrors, the beam paths in the system may not be exactly the same length when the system is assembled. Therefore, in the preferred embodiment of the present invention each possible beam path has an adjustment that fine-tunes that path length without affecting beam position on the wafer 190.

FIG. 5 shows top, front, and side views of the preferred embodiment of the OTB assembly 100, the wafer 190 mounted on a vacuum chuck 210 that is rotated by servomotor assembly 211, and an exhaust tube 200 used to remove reaction byproducts 205. In the front view, mirrors 140 and 141 are shown on moving stage 145 that adjusts the total length of the top beam path. In the top view, mirrors 151 and 152 are shown on moving stage 155 that adjusts the total length of the apex beam path. In the front view, mirrors 161 and 162 are shown on moving stage 165 that adjusts the total length of the bottom beam path. As each stage with two mirrors is moved, the length of the affected beam path is adjusted by twice the distance that the stage is moved without moving the beam position on wafer 190. In the side view, camera 180 is shown as being vertically adjustable to adjust the path length to the camera 180.

In a preferred embodiment, an exhaust system as shown in FIGS. 6 a to 6 d carries reaction by-products away from the reaction site at the wafer 190. The servomotor assembly 211 rotates wafer 190 through a slot 201 in the side of exhaust tube 200. An external exhaust source draws ambient gas through the intake end 206 of the exhaust tube 200, thus carrying away reaction by-products 205. The beam reaches the wafer through the exhaust tube by means of slots 202 and 204 and hole 203. If the slots 202 and 204 were opposite each other on the exhaust tube 200, then as the beam was scanned off the edge of the wafer 190, the beam would exit the exhaust tube 200 through the opposite slot, causing damage inside the OTB assembly 100. In a preferred embodiment the slots 202 and 204 are offset from each other so that the beam is blocked by the opposite side of the exhaust tube 200, which is lined with a material, such as textured synthetic fused silica, which is impervious to the laser beam.

In FIG. 6 a the exhaust tube 200 moves into position so that slot 202 is aligned with the top laser beam 114, which is directed through the slot 202 to the top of wafer 190. In FIG. 6 b the exhaust tube 200 moves into position so that hole 203 is aligned with the apex laser beam 115, which is directed through the hole 203 to the apex of wafer 190. In FIG. 6 c the exhaust tube 200 moves into position so that slot 204 is aligned with the bottom laser beam 116, which is directed through the slot 204 to the bottom of wafer 190. In FIG. 6 d the exhaust tube 200 is moved away from the wafer 190 so that robot 232, shown in FIG. 8, can load or unload the wafer to or from the vacuum chuck 210, shown in FIG. 8.

The optional gas injection systems shown in FIGS. 7 a, 7 b, and 7 c may enhance the reaction between the laser beam and the material being processed. Gases are fed from an external source into the system. Such injected gas may be beneficial in processing the unwanted films, residues, or particles. In a preferred embodiment, the injected gas is an oxidizing gas. Reducing gases such as hydrogen are also effective in removing photoresist. In another embodiment, the injection of hydrogen may also be used to prevent the formation of an oxide layer. The gas injection system may also enhance the removal of unwanted by-products.

In one embodiment, shown in FIG. 7 a, the gas streams 235 and/or 236 are produced by a top injector 230 and/or a bottom injector 231 that are fed by gas lines 239. To optimize the reaction, the angle of the injectors 230 and/or 231 can be adjusted with respect to the surface of wafer 190, which is mounted on vacuum chuck 210 and is rotated by servomotor assembly 211. The laser beams 114, 115, and 116 process the edges of wafer 190 while gas streams 235 and/or 236 are flowing.

In another embodiment of an optional gas injection system, shown in FIG. 7 b, the gas stream 237 is produced by an axial injector 232 that is fed by a gas line 239 into the intake end 206 of the exhaust tube 200. This configuration adds gas to the environment surrounding the reaction site. The laser beams 114, 115, and 116 process the edges of wafer 190 while gas stream 237 is flowing.

In a third embodiment, shown in FIG. 7 c, the gas stream 238 is produced by an injector 233, attached to an orifice in the side of the exhaust tube 200, and fed by gas line 239 such that the gas flow is aimed at the reaction site on the wafer 190. The laser beams 114, 115, and 116 process the edges of wafer 190 while gas stream 238 is flowing.

Other configurations combining the above injection methods and/or exhaust baffles may be used to enhance the reaction.

FIG. 8 shows OTB assembly 100 and all of its supporting components integrated into an embodiment of a wafer edge processing system 105. Robot 222 gets wafer 190 from FOUP (Front Opening Unified Pod) 221, which is located on top of load port module 220, and places wafer 190 onto vacuum chuck 210. Exhaust tube 200 is then slid into place around wafer 190. The laser 110 emits beam 111, which is directed by one or more beam-steering mirrors 113, passes through beam shaping optics 112, and enters OTB assembly 100. As wafer 190 is rotated by servomotor assembly 211, OTB assembly 100 directs the beam to one or more wafer edges, as shown in FIGS. 1 b, 1 c, and 1 d. Exhaust tube 200 carries by-products 205 away from the reaction site. After wafer 190 has been processed, exhaust tube 200 slides away from the wafer 190 and robot 222 removes wafer 190 from vacuum chuck 210 and returns it to FOUP 221.

The preferred embodiment is an all-dry process with no waste-treatable by-products. Edge processing or edge film removal from the top bevel, apex, bottom bevel, and bottom edges of the wafer can also be accomplished during the same process cycle. This method and apparatus is capable of processing 0 to 25 mm from the bottom edge, to an accuracy of +/−0.1 mm, in order to remove the photoresist that has migrated to the bottom side of the wafer. Likewise, the method and apparatus is capable of processing 0 to 25 mm from the top edge, to an accuracy of +/−0.1 mm. Cleaning the apex is also important since this edge of the wafer contacts the sides of wafer cassettes and robotic handlers used during transport in a manufacturing line. Any breaks or cracks in an un-removed edge bead can then create particles that may get transferred to other cassettes and other wafers, causing defects and loss of useable die.

Current solvent dispense methods that are used to remove the photoresist edge bead are difficult to control. Using the system described herein, the edge exclusion width can be reduced from the current 3-5 mm to less than 1 mm. FIG. 9 a shows an example of a wafer 190 with a 5.0 mm edge exclusion width. Any die that are intersected by the edge exclusion region are lost. In this example there are eighty lost die 198. Using an embodiment described herein, the edge exclusion width can be reduced to 0.6 mm, limited only by the accuracy of the beam placement, which is better than 0.1 mm. This results in only sixteen lost die 199, as shown in FIG. 9 b.

In preferred embodiments the laser is a Nd:YAG laser and is configured to emit pulsed radiation at a wavelength of 355 nm, with a range of pulse repetition rates from 10,000 Hz to 100,000 Hz, which result in variable power levels and pulse energies. Other YAG lasers can be configured to emit radiation at other repetition rates in a range from 1,000 Hz to 500,000 Hz, and other wavelengths such as 213 nm, 266 nm, 532 nm, and 1064 nm. These characteristics may be beneficial to provide higher energy absorption by the material being processed, which leads to more complete reactions, higher throughput, and may enable processes that are ineffective at 355 nm. Other wavelengths, such as 193 nm, 248 nm, or 308 nm produced by an excimer laser, may be useful for certain applications. Still other applications may benefit from the use of a continuous wave (CW) laser such as a 364 nm argon ion laser. Beam shaping optics may be used to alter the profile of the laser beam. In one embodiment, diffractive beam-shaping optics are used to produce a beam that has a top-hat profile in the scan direction but a Gaussian profile in the perpendicular direction. In another embodiment, diffractive beam-shaping optics are used to produce a rectangular beam that has a top-hat profile in both directions. In yet another embodiment, a homogenizer is used to create a uniform beam profile. By thus flattening the beam profile, wider process latitude, selective material removal, and sharper edge definition can be achieved.

One application of the systems and methods described herein is to eliminate problems that result after a sub-micron layer of photoresist is spin-coated onto a silicon wafer and baked. This process causes a thickened bead of photoresist at the wafer edge. To prevent peeling and de-lamination by the immersion fluid used in an imaging tool, such as the ASML 193 nm laser-based step-and-scan system, the resulting bead of photoresist on the edge of the wafer must be removed prior to the lithographic step. The present invention provides a method and apparatus for removing this edge bead. If the photoresist bead is not removed, the fluid flows over the wafer during exposure and undercuts the photoresist layer, causing it to lose adhesion, lift at the edges, break off, and re-deposit onto the wafer. This results in the loss of otherwise useable die. In addition, if this bead is not removed, it may stick to robotic handlers and transfer photoresist flakes to other tools and other wafers, causing tool downtime and die loss.

In an example of another application of photoresist edge-bead removal using the techniques herein, very thick coatings of 2.5 microns, for example, can be removed without leaving any detectable residue. In this application, a 0.6 mm wide edge bead from the top of the wafer was removed in less than 5 seconds of process time with a laser beam shaped into an elongated ellipse with an aspect ratio of greater than 10:1 and the long axis in the circumferential direction. This permits the laser beam to make a sharp slice into the thick photoresist coating, leaving behind a narrow transition between cleaned and uncleaned photoresist. The characteristics of this transition can be varied by changing the shape and edge profile of the incident laser beam. This photoresist edge bead removal application was carried out on a 200 mm wafer in open atmosphere with 355 nm radiation from the 3rd harmonic of a 12 W Nd:YAG (neodymium-doped yttrium aluminum garnet) laser pulsed at 17 kHz, a 0.1×1.5 mm Gaussian beam with 50% pulse-to-pulse overlap, a peak energy density of 350 mJ/cm², and a wafer spin rate of 1270 rpm.

In an example of another application, a tri-layer film is removed. This is a film stack that can be designed to minimize the reflections occurring during lithography, thereby permitting higher imaging resolution to produce advanced semiconductor devices. One example is a tri-layer film, successfully removed by the present invention, consists of an organic bottom anti-reflection coating (BARC), a middle silicon ARC layer, and a top layer of photoresist. This tri-layer film stack removal application was carried out on a 300 mm wafer in open atmosphere with 355 nm radiation from the 3rd harmonic of a 12 W Nd:YAG laser pulsed at 15 kHz, a 0.1×1.5 mm Gaussian beam with 50% pulse-to-pulse overlap, a peak energy density of 400 mJ/cm², and a wafer spin rate of 728 rpm. This process removes 1 mm of width in 8 seconds.

The laser edge-bead removal method and apparatus described herein permits a much better defined and sharper transition zone between removed and unremoved films than can be achieved with prior art using chemicals, plasma, or mechanical methods. More importantly, the ability to create a more sharply defined sidewall in the post-cleaned film provides more silicon area for useable die and can therefore increase die yield on each wafer, which can result in major revenue increases for semiconductor manufacturers.

In another application, a residue of polishing compound slurry is thermally encapsulated. Such residue is the result of a process called chemical mechanical polishing (CMP), used in multiple steps in the fabrication of semiconductor devices. CMP residue consists of unwanted granular particulates from polishing compounds, typically containing cerium oxide, which is harder than silicon. In the prior art, such residue is etched off using a four-step process, using first a mixture of ammonium hydroxide and hydrogen peroxide (SC1), then a mixture of sulfuric acid and hydrogen peroxide (SC2), followed by a de-ionized water rinse and a drying cycle. These mixtures are heated and are highly corrosive, so that special facilities are required, along with protective equipment for operators and special provisions for hazardous waste disposal.

In accordance with the embodiments described herein, one example of a process for removing this polishing residue uses a 3rd harmonic YAG laser delivering an energy density of 1000 to 2400 mJ/cm² to thermally encapsulate the slurry residue on the wafer edge by melting and re-flowing the silicon surface. This process typically takes 10 seconds to encapsulate 1 mm of the bottom edge of a 300 mm wafer. No corrosive chemicals, water, or drying cycles are required, and there is no hazardous waste as with the prior art methods cited above. In another example the beam is used at a lower energy density to permit the melting of only the areas of the wafer containing the residue while not melting the surrounding silicon surface.

In an example of another application, a post-etch polymer (PEP) residue is removed from the wafer edges. In this example, a reactive ion dry etching step leaves a thin PEP residue as a by-product of the etching process. This residue is extremely difficult to remove due to its chemical nature, being a Teflon-like chlorofluoropolymer. When these residues are present on the bottom side of the wafer, they cause warping of the wafer on a vacuum chuck resulting in image distortion during lithography. In an embodiment, a 1 mm annulus of these residues can be removed in 10 seconds on a 300 mm wafer using a 12 W, 3rd harmonic Nd:YAG laser with an energy density of 500 to 1200 mJ/cm². The process uses only air as the reactive gas mixture, operates at atmospheric pressure, and does not cause any heat build-up. Further, there is no detectable debris or by-products based on high magnification (150,000×) SEM analysis.

In an example of another application, a copper film is removed from the edge of a 300 mm silicon wafer. This application took 14 seconds per mm of copper removed, and was carried out in open atmosphere with 355 nm radiation from a 12 W, 3rd harmonic Nd:YAG laser pulsed at 22 kHz, a 0.25×0.17 mm Gaussian beam with 75% pulse-to-pulse overlap, a peak energy density of 1000 mJ/cm², and a wafer spin rate of 60 rpm.

In another application, organic and inorganic particles that are generated during semiconductor processing are removed. Particles from the robotic end effectors, wafer cassettes, ion implantation, or other sources during processing may end up on the wafer edge and need to be removed.

For a wide range of applications, laser energy densities used range from 150 to 2500 mJ/cm². Although 355 nm radiation, from the 3rd harmonic of a Nd:YAG laser, with a pulse width of 30 to 60 ns, is typically used, other wavelengths and other lasers can also be employed. One example is 532 nm radiation from the 2nd harmonic of a Nd:YAG laser, with 33% lower cost per watt. Alternatively, shorter wavelengths such as 266 nm radiation from the 4th harmonic of a Nd:YAG laser, or 193 nm radiation from an ArF excimer laser can be used to remove more difficult materials such as metals and oxides. Other examples of lasers that can be employed in the present invention include a continuous-wave (CW) argon-ion laser, a pulsed KrF excimer laser, and a 1 to 6 ns pulse-width Yb:YAG laser (ytterbium-doped yttrium aluminum garnet). For a given energy density, a shorter pulse width will result in a higher local, instantaneous substrate temperature. Since this higher temperature increases reactivity, it is advantageous in some applications to use a very short pulse-width laser. In light of the above disclosure, it will now be evident to those skilled in the art that a very wide variety of pulsed and CW, gas and solid-state lasers may be used.

The teachings of all patents, published applications and references cited herein are incorporated by reference in their entirety.

While this invention has been particularly shown and described with references to example embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention encompassed by the appended claims. While the preferred embodiment(s) of the present invention(s) are now shown and described, it is envisioned that those skilled in the art may devise various modifications without departing from the spirit and scope of the appended claims, and it is therefore only the claims that define the legal scope of this invention. 

1. An apparatus for removing or transforming films, particles, and residues on the edges of a substrate, comprising the following: a laser beam; a rotating substrate having a top, apex, and bottom edges; and an optical assembly receiving said laser beam and directing the laser beam to two or more of the top, apex, and bottom edges of the rotating substrate.
 2. The apparatus of claim 1 wherein the wavelength of said laser beam is between 190 nm and 770 nm.
 3. The apparatus of claim 1 wherein the optical assembly scans the laser beam in a direction substantially orthogonal to the path of rotation of the substrate edge.
 4. The apparatus of claim 3 wherein scanning is accomplished by a galvanometric mirror scanner.
 5. The apparatus of claim 1 wherein the optical assembly includes focusing optics.
 6. The apparatus of claim 5 wherein said focusing optics is an f-theta scan lens.
 7. The apparatus of claim 6 wherein said f-theta scan lens is telecentric.
 8. The apparatus of claim 1 wherein the optical assembly includes a multi-mirror sub-assembly.
 9. The apparatus of claim 8 wherein the laser beam is directed to a metrology camera.
 10. The apparatus of claim 8 wherein said multi-mirror subassembly contains one or more movable mirrors.
 11. The apparatus of claim 10 wherein said movable mirrors are moved in a direction parallel to their reflecting surfaces.
 12. The apparatus of claim 8 wherein optical path lengths of said top, apex, and bottom positions of the optics are nominally equal.
 13. The apparatus of claim 9 wherein optical path lengths of said top, apex, bottom, and camera positions of the optics are nominally equal.
 14. The apparatus of claim 12 additionally comprising: pairs of mirrors located in the top, apex, and bottom optical paths; and one or more moving stages, for moving the mirrors such that said optical path lengths can be adjusted to be precisely equal.
 15. The apparatus of claim 1 wherein the optics are arranged such that the two or more substrate edges are exposed simultaneously.
 16. The apparatus of claim 15 additionally comprising an exhaust assembly to remove reaction by-products, and wherein the exhaust assembly is axially shiftable to two or more positions.
 17. The apparatus of claim 15 additionally comprising an injector assembly for directing a fluid to two or more of the substrate edges being exposed to the laser radiation.
 18. The apparatus of claim 1 wherein said apparatus is part of a stand-alone semiconductor wafer edge-processing system.
 19. The apparatus of claim 1 wherein said optical assembly is integrated into a module for use in a semiconductor wafer edge-processing system.
 20. A method for processing edges of a substrate comprising: delivering a beam of laser radiation to top, apex, and bottom edges of the substrate; moving the beam and the substrate relative to one another; delivering a flow of a fluid to a reaction region of the substrate edges while the beam is being delivered to the edges of the substrate; and removing reaction by-products via an exhaust flow. 